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Figure 3 from A dual mode SOI CMOS MEMS based …

DOI: / Corpus ID: 21038678. A dual mode SOI CMOS MEMS based thermal conductivity and IR absorption gas sensor article{Sarfraz2013ADM, title={A dual mode SOI CMOS MEMS based thermal conductivity and IR absorption gas sensor}, author={S. Sarfraz and R. Kumar and F. Udrea}, journal={2013 IEEE SENSORS}, …


SOI CMOS multisensors MEMS chip for aerospace ...

SOI CMOS multisensors MEMS chip for aerospace applications Abstract: In this paper, we report for the first time an SOI CMOS multisensors MEMS chip, capable of sensing three key flow parameters pressure, temperature and flow rate simultaneously. The chip contains an array of ten silicon diode temperature sensors, a piezoresistive pressure sensor and an array of nine …


Figure 2 from A dual mode SOI CMOS MEMS based …

Fig. 2: 3D FEM simulation for dc input voltage (a) 3D temperature profile across the sensor showing thermal isolation of microheater. (b) A vertical sliced image of a portion of the heated air above the microheater and all the air within the DRIE cavity on the underside for natural convection case. (c) A vertical sliced image of a portion of the heated air above the micro …


Figure 4 from A dual mode SOI CMOS MEMS based …

DOI: / Corpus ID: 21038678. A dual mode SOI CMOS MEMS based thermal conductivity and IR absorption gas sensor


SOI CMOS and MEMS for singlechip hightemperature ...

Bibliographic reference: Flandre, Denis ; Laconte, Jean ; Levacq, David ; Afzalian, Aryan ; Rue, Bertrand ; et. al. SOI CMOS and MEMS for singlechip hightemperature International Conference on High Temperature Electronics (HITEN 2005) (Paris (France), du 06/09/2005 au 08/09/2005).In: Proceedings of the 2005 International Conference on High …


SOI CMOS multisensors MEMS chip for aerospace ...

In this paper, we report for the first time an SOI CMOS multisensors MEMS chip, capable of sensing three key flow parameters pressure, temperature and flow rate simultaneously. The chip contains an array of ten silicon diode temperature sensors, a piezoresistive pressure sensor and an array of nine micro hotfilm flow rate sensors. The chip has been fabricated through a …


SingleChip CMOSMEMS Dual Mode Scanning …

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Design and Characterization of a DualMode CMOS …

Abstract: A novel complimentary metaloxidesemiconductormicroelectormechanical systems (CMOSMEMS) composite ring resonator capable of a dualmode operation has been proposed to enable temperature coefficient of frequency (TC f A novel complimentary metaloxidesemiconductormicroelectormechanical systems (CMOSMEMS) composite ring resonator


A dual mode SOI CMOS MEMS based thermal conductivity and ...

Design, FEM modelling and characterization of a novel dual mode thermal conductivity and infrared absorption sensor using SOI CMOS technology is reported. The dual mode sensing capability is based on the temperature sensitivity and wideband infrared radiation emission of the resistive heating element. The sensor was fabricated at a commercial foundry using a 1 μm …


SOI CMOS multisensors MEMS chip for aerospace ...

IEEE Xplore, delivering full text access to the world''s highest quality technical literature in engineering and technology. | IEEE Xplore